8 February 2024
Computational Engineering, Finance, and Science
Eva Maria Weig,
Applies shape optimization to MEMS gyroscope design
Parametrizes coordinates of finite element mesh nodes
Implements gradients of eigenfrequencies and manufacturability constraints
Tunes frequency split and shifts away spurious modes
Obtains unintuitive shapes that enhance performance
Optimizing Frequencies and Shapes in MEMS Gyroscopes
This paper applies shape optimization techniques to automatically design novel geometries for MEMS gyroscopes. By parametrizing spring shapes and implementing eigenfrequency gradients, an algorithm tailors the frequency split between drive and detection modes. It also shifts other modes away from key frequencies, while satisfying manufacturability constraints. This explores unintuitive shapes beyond human design capabilities.
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