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Optimizing Frequencies and Shapes in MEMS Gyroscopes

Published on:

8 February 2024

Primary Category:

Computational Engineering, Finance, and Science

Paper Authors:

Daniel Schiwietz,

Marian Hörsting,

Eva Maria Weig,

Peter Degenfeld-Schonburg,

Matthias Wenzel

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Key Details

Applies shape optimization to MEMS gyroscope design

Parametrizes coordinates of finite element mesh nodes

Implements gradients of eigenfrequencies and manufacturability constraints

Tunes frequency split and shifts away spurious modes

Obtains unintuitive shapes that enhance performance

AI generated summary

Optimizing Frequencies and Shapes in MEMS Gyroscopes

This paper applies shape optimization techniques to automatically design novel geometries for MEMS gyroscopes. By parametrizing spring shapes and implementing eigenfrequency gradients, an algorithm tailors the frequency split between drive and detection modes. It also shifts other modes away from key frequencies, while satisfying manufacturability constraints. This explores unintuitive shapes beyond human design capabilities.

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